Title :
Fabrication of a sealed wire grid polarizer by use of room-temperature-bonding
Author :
Asano, Katsunori ; Yokoyama, Shiyoshi ; Kemmochi, Atsushi ; Kikuchi, Kazuro ; Yatagai, Toyohiko
Author_Institution :
Center for Opt. Res. & Educ., Utsunomiya Univ., Utsunomiya, Japan
Abstract :
A wire grid polarizer with the high durability of thermal oxidation for UV spectral range is proposed. The wire grids were fabricated by KrF lithography and dry etching. The substrate on which wire grids are mounted and a substrate cover were bonded in high vacuum by room-temperature-bonding technique. This sealed wire grid polarizer shows very good thermal stability in the extinction ratio in UV spectral range.
Keywords :
durability; etching; extinction coefficients; lead bonding; optical fabrication; optical polarisers; oxidation; photolithography; thermal stability; ultraviolet spectra; KrF lithography; UV spectra; dry etching; durability; extinction ratio; room-temperature-bonding; sealed wire grid polarizer; temperature 293 K to 298 K; thermal oxidation; thermal stability; Extinction ratio; Heating; Optical device fabrication; Optical polarization; Oxidation; Substrates; Wires;
Conference_Titel :
Microoptics Conference (MOC), 2013 18th
Conference_Location :
Tokyo
