DocumentCode :
675574
Title :
Direct point-contact characterization of Bias instability on bare SOI wafers
Author :
Marquez, C. ; Rodriguez, N. ; Fernandez, Camino ; Ohata, Akira ; Gamiz, Francisco ; Allibert, F. ; Cristoloveanu, S.
Author_Institution :
Nanoelectron. Res. Group, Univ. de Granada, Granada, Spain
fYear :
2013
fDate :
7-10 Oct. 2013
Firstpage :
1
Lastpage :
2
Abstract :
Bias Instability is a reliability issue affecting the threshold voltage of a MOS transistor when the gate is stressed with relatively high voltage. For the first time, we characterize the instability of bare SOI wafers using a Pseudo-MOSFET configuration. The effect of positive and negative stress pulses on the properties of both hole and electron channels is systematically investigated. The origins of the instability, the dependence of the degradation with time, and the recovery after the stress have been discussed.dependence
Keywords :
MOSFET; point contacts; semiconductor device reliability; silicon-on-insulator; MOS transistor; bare SOI wafers; bias instability; degradation dependence; direct point-contact characterization; electron channels; hole channels; positive stress pulses; pseudoMOSFET configuration; reliability; stress pulses; threshold voltage; Bismuth; Charge carrier processes; Degradation; Logic gates; Reliability; Stress; Voltage measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), 2013 IEEE
Conference_Location :
Monterey, CA
Type :
conf
DOI :
10.1109/S3S.2013.6716529
Filename :
6716529
Link To Document :
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