Design and simulation of mass-spring-dashpot system for RFMEMS Switch

Design and analysis the structure of the mass-spring-dashpot of the RFMEMS switch are presented in this work. Most familiar method applies in designing MEMS switch is the spring design with difference length and width. These two parameters affect the capability of the spring to support the mass during `ON´ and `OFF´ operation by applying Hooke´s Law to identify a suitable spring constant. The analysis is to observe the effects of the electrostatic parameter in terms of voltage, pull in stability, transient rise time, harmonic mode related to the spring movement and von Mises stress of the design. The MEMS switch using this cantilever beam was 15.9375 V of pull-in voltage and transient time of 12 μs. The spring constant for this cantilever beam is 79.9 N with quality factor of 0.0158.