Design of a single-plane two-dimensional micropositioning stage based on the oval amplification mechanism

In order to improve the dynamic stability, the response speed and positioning accuracy, the oval amplification mechanisms and flexible hinges are added to the integrated two-dimensional micro-positioning stage, which makes the stage have two-dimensional motion in a single plane and effectively reduce its volume. The effects of the parameters of the oval amplification mechanism and flexible hinge on the stiffness and the output displacement of the micro-positioning stage are analyzed with the theoretical analysis and finite element method. Combining with the dynamic characteristics analysis, the results show that the designed micro-positioning stage has high dynamic stability and small displacement coupling.