DocumentCode
68035
Title
A Variable Response Phosphine Sensing Matrix Based on Nanostructure Treated p and n-Type Porous Silicon Interfaces
Author
Gole, James L. ; Laminack, William I.
Author_Institution
Sch. of Phys. & Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Volume
14
Issue
8
fYear
2014
fDate
Aug. 2014
Firstpage
2731
Lastpage
2738
Abstract
We study the dynamic interplay as PH3 interacts at room temperature to contribute electrons to nanostructure modified p and n-type porous silicon (PS) interfaces. A nanopore coated microporous interface is treated to form TiO2, SnOx, CuxO, and AuxO (x ≫ 1) nanostructured centers deposited in fractional coverage on the PS interface. Relative sensitivities of the surface sites are measured under 2-5 and 10 ppm PH3 exposure. The interaction with two p-type nanostructure decorated boron-doped interfaces demonstrates enhancement of sensitivity relative to undecorated PS. The results are explained using the inverse hard/soft acid/base (IHSAB) principle, combining the tenants of acid/base chemistry and semiconductor physics. Analyte coupling to the majority charge carriers of the extrinsic semiconductor determines the nature of directed electron transduction as it induces a change in conductance. As applied, the nanostructured metal oxides serve as gateways, forcing a dominant electron transduction (versus chemisorption) at the decorated extrinsic semiconductor interface. A study of gold clustered oxide depositions on p-type (1-3 Q-cm) PS demonstrates that an optimal fractional deposition can be attained and should not be exceeded to avoid crosstalk between the deposited nanoparticles. It appears that phosphine can be converted on interaction with phosphorous doped n-type PS. A reversal of the response signal observed with increased PH3 concentration, considered within the IHSAB model, suggests that the conductance might be associated with the formation of the electron withdrawing PH2 radical.
Keywords
elemental semiconductors; gas sensors; nanoparticles; nanoporous materials; nanosensors; phosphorus compounds; porous semiconductors; silicon; titanium compounds; IHSAB model; PH3 exposure; PS interface; Si-AuxO; Si-CuxO; Si-SnOx; Si-TiO2; acid-base chemistry; charge carriers; decorated extrinsic semiconductor interface; electron transduction; gateways; inverse hard-soft acid-base principle; n-type porous silicon interface; nanoparticles; nanopore coated microporous interface; nanostructured center; nanostructured metal oxides; optimal fractional deposition; p-type nanostructure; p-type porous silicon interface; semiconductor physics; variable response phosphine sensing matrix; Gold; Resistance; Sensitivity; Sensors; Silicon; Surface treatment; Gas sensors; nanoparticles; nanoporous materials; titanium oxide;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2014.2316117
Filename
6784316
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