• DocumentCode
    68035
  • Title

    A Variable Response Phosphine Sensing Matrix Based on Nanostructure Treated p and n-Type Porous Silicon Interfaces

  • Author

    Gole, James L. ; Laminack, William I.

  • Author_Institution
    Sch. of Phys. & Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
  • Volume
    14
  • Issue
    8
  • fYear
    2014
  • fDate
    Aug. 2014
  • Firstpage
    2731
  • Lastpage
    2738
  • Abstract
    We study the dynamic interplay as PH3 interacts at room temperature to contribute electrons to nanostructure modified p and n-type porous silicon (PS) interfaces. A nanopore coated microporous interface is treated to form TiO2, SnOx, CuxO, and AuxO (x ≫ 1) nanostructured centers deposited in fractional coverage on the PS interface. Relative sensitivities of the surface sites are measured under 2-5 and 10 ppm PH3 exposure. The interaction with two p-type nanostructure decorated boron-doped interfaces demonstrates enhancement of sensitivity relative to undecorated PS. The results are explained using the inverse hard/soft acid/base (IHSAB) principle, combining the tenants of acid/base chemistry and semiconductor physics. Analyte coupling to the majority charge carriers of the extrinsic semiconductor determines the nature of directed electron transduction as it induces a change in conductance. As applied, the nanostructured metal oxides serve as gateways, forcing a dominant electron transduction (versus chemisorption) at the decorated extrinsic semiconductor interface. A study of gold clustered oxide depositions on p-type (1-3 Q-cm) PS demonstrates that an optimal fractional deposition can be attained and should not be exceeded to avoid crosstalk between the deposited nanoparticles. It appears that phosphine can be converted on interaction with phosphorous doped n-type PS. A reversal of the response signal observed with increased PH3 concentration, considered within the IHSAB model, suggests that the conductance might be associated with the formation of the electron withdrawing PH2 radical.
  • Keywords
    elemental semiconductors; gas sensors; nanoparticles; nanoporous materials; nanosensors; phosphorus compounds; porous semiconductors; silicon; titanium compounds; IHSAB model; PH3 exposure; PS interface; Si-AuxO; Si-CuxO; Si-SnOx; Si-TiO2; acid-base chemistry; charge carriers; decorated extrinsic semiconductor interface; electron transduction; gateways; inverse hard-soft acid-base principle; n-type porous silicon interface; nanoparticles; nanopore coated microporous interface; nanostructured center; nanostructured metal oxides; optimal fractional deposition; p-type nanostructure; p-type porous silicon interface; semiconductor physics; variable response phosphine sensing matrix; Gold; Resistance; Sensitivity; Sensors; Silicon; Surface treatment; Gas sensors; nanoparticles; nanoporous materials; titanium oxide;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2014.2316117
  • Filename
    6784316