DocumentCode
683634
Title
AFM based methods for mechanical characterization of Nanothin films in electronics
Author
Kopycinska-Muller, Malgorzata ; Striegler, Andre ; Kuzeyeva, Nataliya ; Kohler, Benjamin ; Wolter, Klaus-Jurgen
Author_Institution
Fac. of Electr. Eng. & Inf. Technol., Tech. Univ. Dresden, Dresden, Germany
fYear
2013
fDate
11-13 Dec. 2013
Firstpage
394
Lastpage
398
Abstract
We have developed a methodology to determine local indentation modulus M for films with thickness ranging from several nanometers to several hundreds of nanometers with nano-scale lateral resolution. Our results obtained for silicon oxide as well as porous organosilicate glasses were in a very good agreement with those provided by nanoindentation methods. The method used is the so-called atomic force acoustic microscopy (AFAM).
Keywords
atomic force microscopy; nanoindentation; silicon compounds; AFM; atomic force acoustic microscopy; atomic force microscopy; electronics; local indentation modulus; mechanical characterization; nanoindentation methods; nanothin films; porous organosilicate glasses; Conferences; Decision support systems; Electronics packaging; Noise measurement; Three-dimensional displays;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Packaging Technology Conference (EPTC 2013), 2013 IEEE 15th
Conference_Location
Singapore
Print_ISBN
978-1-4799-2832-3
Type
conf
DOI
10.1109/EPTC.2013.6745749
Filename
6745749
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