Research on micro-vibration measurement technique based on laser self-mixing interference

This paper studies the basic principle and theoretic model of the vibration measurement based on self-mixing interference, and analyzes the feasibility of self-mixing interference measuring micro vibration system theoretically. A self-mixing interference test system was designed and built which were tried. The test results show that the device can get a better self-mixing interference signal, and micro vibration measurement precision can reach 325nm.