DocumentCode
688572
Title
High resolution electrical, optical, and thermal metrology for sub-micron optoelectronic devices
Author
Hudgings, J.
Author_Institution
Mount Holyoke Coll., Alenas Imaging, Inc., South Hadley, MA, USA
fYear
2013
fDate
9-14 June 2013
Firstpage
1
Lastpage
2
Abstract
We demonstrate a commercialization-ready metrology tool for electrical, optical, and thermal characterization of operating optoelectronic devices, with a spatial resolution of 250nm. Applications are demonstrated to a wide range of electrical and photonic devices.
Keywords
infrared imaging; optical variables measurement; optoelectronic devices; high resolution electrical metrology; high resolution optical metrology; high resolution thermal metrology; spatial resolution; submicron optoelectronic devices; Integrated optics; Metrology; Optical filters; Optical imaging; Optical reflection; Reflectivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6832946
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