Title :
High resolution electrical, optical, and thermal metrology for sub-micron optoelectronic devices
Author_Institution :
Mount Holyoke Coll., Alenas Imaging, Inc., South Hadley, MA, USA
Abstract :
We demonstrate a commercialization-ready metrology tool for electrical, optical, and thermal characterization of operating optoelectronic devices, with a spatial resolution of 250nm. Applications are demonstrated to a wide range of electrical and photonic devices.
Keywords :
infrared imaging; optical variables measurement; optoelectronic devices; high resolution electrical metrology; high resolution optical metrology; high resolution thermal metrology; spatial resolution; submicron optoelectronic devices; Integrated optics; Metrology; Optical filters; Optical imaging; Optical reflection; Reflectivity;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
