Title :
High-Q mid-infrared chalcogenide glass-on-silicon resonators for spectroscopic chemical sensing
Author :
Hongtao Lin ; Lan Li ; Yi Zou ; Danto, Sylvain ; David Musgraves, J. David ; Richardson, Kathleen ; Juejun Hu
Author_Institution :
Dept. of Mater. Sci. & Eng., Univ. of Delaware, Newark, DE, USA
Abstract :
We fabricated and characterized high-index-contrast As2Se3 micro-disk resonators on silicon with a record loaded Q-factor of 105 at 5.2 μm wavelength. On-chip chemical sensing using cavity-enhanced infrared spectroscopy was demonstrated using the micro-disk device.
Keywords :
arsenic compounds; chalcogenide glasses; chemical sensors; elemental semiconductors; infrared spectra; microcavities; micromechanical resonators; microsensors; silicon; As2Se3-Si; cavity-enhanced infrared spectroscopy; high-Q mid-infrared chalcogenide glass-on-silicon resonators; high-index-contrast microdisk resonators; loaded Q-factor; microdisk device; on-chip chemical sensing; spectroscopic chemical sensing; wavelength 5.2 mum; Optical device fabrication; Optical fiber sensors; Optical ring resonators; Optical waveguides;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
