Title :
Free z-focus control laser processing via ultra-high speed axial scanning
Author :
Duocastella, Marti ; Arnold, Craig B.
Author_Institution :
Dept. of Mech. & Aerosp. Eng., Princeton Univ., Princeton, NJ, USA
Abstract :
An ultra-high speed axial scanner is used to enhance the depth of field of a laser system without sacrificing lateral resolution. This new approach eliminates the classic constraint of precise z-focus control in laser processing.
Keywords :
high-speed optical techniques; image resolution; laser materials processing; optical control; optical focusing; optical scanners; depth-of-field enhancement; free z-focus control laser processing; lateral resolution; ultra-high speed axial scanner; ultra-high speed axial scanning; Laser beams; Lasers; Lenses; Measurement by laser beam; Process control; Silicon; Surface treatment;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
