DocumentCode
688629
Title
Optically-transparent actuators and micro-mechanical systems fabricated using femtosecond lasers
Author
Bellouard, Yves ; Lenssen, Bo ; Tielen, Viktor ; Tao Yang
Author_Institution
Mech. Eng. Dept., Eindhoven Univ. of Technol., Eindhoven, Netherlands
fYear
2013
fDate
9-14 June 2013
Firstpage
1
Lastpage
2
Abstract
Non-linear laser-matter interaction offers the possibility to structure transparent material in three dimensions. Here, we demonstrate that such process can be implemented for fabricating novel type of microsystems, including actuators transparent to visible light.
Keywords
high-speed optical techniques; laser materials processing; micro-optomechanical devices; microactuators; microfabrication; optical fabrication; transparency; femtosecond lasers; micromechanical systems; microsystems; nonlinear laser-matter interaction; optically-transparent actuators; transparent material; visible light; Actuators; Nonlinear optics; Optical device fabrication; Optical imaging; Optical interferometry; Silicon compounds; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6833004
Link To Document