Title :
High Q SiC on silicon microresonators
Author :
Cardenas, Jamie ; Mian Zhang ; Phare, Chris ; Shah, Shalin ; Poitras, Carl B. ; Lipson, Michal
Author_Institution :
Dept. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
We demonstrate a 20um radius suspended microring resonator with Q=19,000 fabricated on SiC-on-silicon substrates. We estimate the fundamental material losses to be less than 3.3 dB/cm indicating that quality factors greater than 105 are possible.
Keywords :
Q-factor; elemental semiconductors; integrated optics; micro-optomechanical devices; microcavities; microfabrication; micromechanical resonators; optical losses; optical materials; optical resonators; silicon; silicon compounds; SiC-Si; SiC-on-silicon substrates; fundamental material losses; microresonators; quality factor; radius 20 mum; suspended microring resonator; Optical device fabrication; Optical fibers; Optical resonators; Silicon carbide; Substrates;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
