Title :
Performance enhancement in quantum well infrared photodetector utilizing the grating structure
Author :
Ming-Lun Lee ; Cheng-Ju Hsieh ; Yao-Hong You ; Vin-Cent Su ; Po-Hsun Chen ; Hung-Chou Lin ; Han-Bo Yang ; Hung-Ming Chen ; Chieh-Hsiung Kuan
Author_Institution :
Grad. Inst. of Electron. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
We fabricate four different size grating structure on the top of the quantum well infrared photodetectors, then etch them into four different etching depth. With suitable design, the peak responsivity of the QWIPs is about thirteen times larger than that of the conventional QWIP.
Keywords :
diffraction gratings; etching; infrared detectors; optical design techniques; optical fabrication; photodetectors; quantum well devices; conventional QWIP; etching depth; grating structure fabrication; peak responsivity; performance enhancement; photodector design; quantum well infrared photodetector; Etching; Gallium arsenide; Gratings; Photodetectors; Scanning electron microscopy;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
