Title :
In-situ local temperature measurement during three-dimensional direct laser writing
Author :
Mueller, Jessica ; Fischer, J. ; Mange, Yatin Jadavji ; Nann, Thomas ; Wegener, Martin
Author_Institution :
DFG-Center for Functional Nanostruct., Karlsruhe Inst. of Technol., Karlsruhe, Germany
Abstract :
We present an approach to measure in situ the local temperature increase in the exposed volume during three-dimensional direct laser writing. The method is based on the detection of the luminescence of NaYF4:Yb3+/Er3+ codoped nanocrystals.
Keywords :
erbium; laser materials processing; nanostructured materials; photoluminescence; sodium compounds; temperature measurement; ytterbium; NaYF4:Yb,Er; codoped nanocrystals; in-situ local temperature measurement; luminescence detection; three-dimensional direct laser writing; Chemical lasers; Luminescence; Measurement by laser beam; Nanocrystals; Resists; Temperature measurement; Writing;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
