Title :
Silicon nanomembrane based photonic devices on foreign substrates
Author :
Xiaochuan Xu ; Subbaraman, Harish ; Hosseini, Amir ; Chen, Ray T.
Author_Institution :
Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We demonstrate transferring 2cm × 2cm unpatterned nanomembrane onto glass substrates. A photonic crystal waveguide is patterned together with subwavelength grating couplers on the transferred nanomembrane. Group index up to 26.5 is experimentally demonstrated.
Keywords :
diffraction gratings; elemental semiconductors; nanopatterning; nanophotonics; optical couplers; optical waveguides; photonic crystals; refractive index; silicon; Si; glass substrates; group index; photonic crystal waveguide; photonic devices; silicon nanomembrane; subwavelength grating couplers; Couplers; Couplings; Indexes; Optical waveguides; Photonics; Silicon; Substrates;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
