Title :
Fabrication of high-purity single-crystal diamond nano-slabs for photonic applications
Author :
Luozhou Li ; Hodges, J.S. ; Chen, Edward H. ; Trusheim, Matthew ; Gaathon, Ophir ; Ming Lu ; Bayn, Igal ; Schroder, Tim ; Xiaolong Hu ; Englund, Dirk
Author_Institution :
Dept. of Electr. Eng., Columbia Univ., New York, NY, USA
Abstract :
We present a mass fabrication method of diamond nanoscale slabs by alternating plasma etching and mask deposition. These slabs support NV- spins with long coherence times and are suitable for a range of nanophotonic devices.
Keywords :
diamond; light coherence; nanofabrication; nanophotonics; optical fabrication; sputter etching; NV- spins; coherence times; high-purity single-crystal diamond nanoslabs; mask deposition; nanophotonic devices; plasma etching; Coherence; Diamonds; Etching; Fabrication; Photonic crystals; Photonics; Slabs;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
