Title :
Liquid deposition photolithography for photonic device fabrication
Author :
Urness, Adam C. ; McLeod, Robert R.
Author_Institution :
Dept. of Electr., Comput., & Energy Eng., Univ. of Colorado, Boulder, CO, USA
Abstract :
We describe a novel fabrication method, liquid deposition photolithography (LDP), for the creation of polymer photonic devices. We demonstrate LDPs ability to fabricate photonic devices by fabricating a waveguide array and gradient index lens.
Keywords :
gradient index optics; lenses; optical arrays; optical fabrication; optical polymers; optical waveguides; photolithography; LDP; gradient index lens; liquid deposition photolithography; photonic device fabrication; polymer photonic devices; waveguide array; Fabrication; Indexes; Liquids; Lithography; Photonics; Polymers; Three-dimensional displays;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
