DocumentCode :
689012
Title :
Micro-Raman spectroscopic imaging of He+-irradiation changes in LiNbO3
Author :
Hsu-Cheng Huang ; Dadap, Jerry I. ; Gaathon, Ophir ; Herman, Irving P. ; Osgood, Richard M. ; Bakhru, Sasha ; Bakhru, Hassaram
Author_Institution :
Dept. of Electr. Eng., Columbia Univ., New York, NY, USA
fYear :
2013
fDate :
9-14 June 2013
Firstpage :
1
Lastpage :
2
Abstract :
We use micro-Raman spectroscopy to image ion-induced changes in LiNbO3 during ~MeV He+-irradiation and show high modal-intensity contrast across an implant-patterned surface. Striking image changes in implant regions after annealing are demonstrated.
Keywords :
Raman spectra; annealing; helium; ion beam effects; ion implantation; lithium compounds; He+-irradiation; LiNbO3:He; annealing; high modal-intensity contrast; implant-patterned surface; microRaman spectroscopic imaging; Annealing; Image edge detection; Ions; Lithium niobate; Optical imaging; Spectroscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
Type :
conf
Filename :
6833392
Link To Document :
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