DocumentCode
689012
Title
Micro-Raman spectroscopic imaging of He+-irradiation changes in LiNbO3
Author
Hsu-Cheng Huang ; Dadap, Jerry I. ; Gaathon, Ophir ; Herman, Irving P. ; Osgood, Richard M. ; Bakhru, Sasha ; Bakhru, Hassaram
Author_Institution
Dept. of Electr. Eng., Columbia Univ., New York, NY, USA
fYear
2013
fDate
9-14 June 2013
Firstpage
1
Lastpage
2
Abstract
We use micro-Raman spectroscopy to image ion-induced changes in LiNbO3 during ~MeV He+-irradiation and show high modal-intensity contrast across an implant-patterned surface. Striking image changes in implant regions after annealing are demonstrated.
Keywords
Raman spectra; annealing; helium; ion beam effects; ion implantation; lithium compounds; He+-irradiation; LiNbO3:He; annealing; high modal-intensity contrast; implant-patterned surface; microRaman spectroscopic imaging; Annealing; Image edge detection; Ions; Lithium niobate; Optical imaging; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6833392
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