• DocumentCode
    689012
  • Title

    Micro-Raman spectroscopic imaging of He+-irradiation changes in LiNbO3

  • Author

    Hsu-Cheng Huang ; Dadap, Jerry I. ; Gaathon, Ophir ; Herman, Irving P. ; Osgood, Richard M. ; Bakhru, Sasha ; Bakhru, Hassaram

  • Author_Institution
    Dept. of Electr. Eng., Columbia Univ., New York, NY, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We use micro-Raman spectroscopy to image ion-induced changes in LiNbO3 during ~MeV He+-irradiation and show high modal-intensity contrast across an implant-patterned surface. Striking image changes in implant regions after annealing are demonstrated.
  • Keywords
    Raman spectra; annealing; helium; ion beam effects; ion implantation; lithium compounds; He+-irradiation; LiNbO3:He; annealing; high modal-intensity contrast; implant-patterned surface; microRaman spectroscopic imaging; Annealing; Image edge detection; Ions; Lithium niobate; Optical imaging; Spectroscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833392