• DocumentCode
    689026
  • Title

    An integrated, silica-based, MEMS-actuated, tunable-bandwidth optical filter with low minimum bandwidth

  • Author

    Grutter, Karen E. ; Yeh, Anthony M. ; Grine, Alejandro ; Wu, Ming C.

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, Berkeley, CA, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We present a MEMS-actuated tunable-bandwidth filter implemented in phosphosilicate glass (PSG). Tuning range is 0.8 to 8.5GHz. Based on performance of our stand-alone PSG resonator, minimum bandwidth in PSG can be as low as 30MHz.
  • Keywords
    integrated optics; micro-optomechanical devices; microactuators; micromechanical resonators; optical filters; optical glass; optical resonators; optical tuning; phosphosilicate glasses; PSG; bandwidth 0.8 GHz to 8.5 GHz; integrated silica-based MEMS-actuated tunable- bandwidth optical filter; phosphosilicate glass; stand-alone PSG resonator; Bandwidth; Optical device fabrication; Optical fibers; Optical filters; Optical ring resonators; Resonator filters;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833406