Title :
Nanoscale integrated planar multispectral image sensors
Author :
Balram, Krishna C. ; Miller, David A. B.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., Stanford, CA, USA
Abstract :
We propose and demonstrate planar multispectral image sensors with individual pixel sizes down to 2.5 μm × 575 nm, and whose resonant wavelength can be tuned by varying the width of the pixel.
Keywords :
image sensors; integrated optics; nanophotonics; nanosensors; optical images; optical sensors; optical tuning; nanoscale integrated planar multispectral image sensors; pixel width variation; resonant wavelength tuning; Absorption; Etching; Image sensors; Nanoscale devices; Photodetectors; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
