Title :
Deposited low temperature silicon GHz modulator
Author :
Lee, Y.H.D. ; Thompson, Michael O. ; Lipson, Michal
Author_Institution :
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
We demonstrate multi gigahertz polysilicon electro-optic modulator fabricated using low temperature excimer laser annealing technique compatible with CMOS backend integration. Carrier injection modulation at 3 Gbps is achieved.
Keywords :
CMOS integrated circuits; electro-optical modulation; excimer lasers; integrated optics; laser beam annealing; optical fabrication; optical materials; silicon; CMOS backend integration; Si; bit rate 3 Gbit/s; carrier injection modulation; deposited low temperature silicon GHz modulator; low temperature excimer laser annealing technique; multigigahertz polysilicon electro-optic modulator; CMOS integrated circuits; Modulation; Optical waveguides; Silicon-on-insulator;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
