• DocumentCode
    689161
  • Title

    Fast high-precision distance measurements on scattering technical surfaces using frequency combs

  • Author

    Weimann, C. ; Meier, Daniel ; Wolf, Stefan ; Schleitzer, Y. ; Totzeck, M. ; Heinrich, Adrienne ; Hoeller, F. ; Leuthold, Juerg ; Freude, W. ; Koos, C.

  • Author_Institution
    Inst. of Photonics & Quantum Electron. (IPQ), Karlsruhe, Germany
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Using modulator-generated optical frequency combs we measure the distance to scattering technical surfaces. We achieve measurement errors below 10 μm, a dynamic range of over 37 dB and an acquisition time of 8.3 μs.
  • Keywords
    distance measurement; electro-optical modulation; light interferometry; light scattering; measurement by laser beam; measurement errors; surface topography measurement; acquisition time; fast high-precision distance measurement; measurement errors; modulator-generated optical frequency combs; scattering technical surfaces; time 8.3 mus; Adaptive optics; Frequency measurement; Frequency modulation; Measurement by laser beam; Optical interferometry; Optical variables measurement; Standards;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833543
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=689161