Title :
Fast high-precision distance measurements on scattering technical surfaces using frequency combs
Author :
Weimann, C. ; Meier, Daniel ; Wolf, Stefan ; Schleitzer, Y. ; Totzeck, M. ; Heinrich, Adrienne ; Hoeller, F. ; Leuthold, Juerg ; Freude, W. ; Koos, C.
Author_Institution :
Inst. of Photonics & Quantum Electron. (IPQ), Karlsruhe, Germany
Abstract :
Using modulator-generated optical frequency combs we measure the distance to scattering technical surfaces. We achieve measurement errors below 10 μm, a dynamic range of over 37 dB and an acquisition time of 8.3 μs.
Keywords :
distance measurement; electro-optical modulation; light interferometry; light scattering; measurement by laser beam; measurement errors; surface topography measurement; acquisition time; fast high-precision distance measurement; measurement errors; modulator-generated optical frequency combs; scattering technical surfaces; time 8.3 mus; Adaptive optics; Frequency measurement; Frequency modulation; Measurement by laser beam; Optical interferometry; Optical variables measurement; Standards;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
