Title :
Ultrafast surface inspection using hybrid dispersion laser scanner
Author :
Hongwei Chen ; Goda, Keisuke ; Chao Wang ; Jalali, Bahram
Author_Institution :
Dept. of Electron. Eng., Tsinghua Univ., Beijing, China
Abstract :
We report an ultrafast surface inspection method using a hybrid dispersion laser scanner. Using the technique, we demonstrate real-time detection of microparticles on silicon wafer surfaces at 1,000 times higher scan rates than conventional methods.
Keywords :
high-speed optical techniques; inspection; measurement by laser beam; silicon; Si; hybrid dispersion laser scanner; microparticles; real-time detection; scan rates; silicon wafer surfaces; ultrafast surface inspection method; Dispersion; High-speed optical techniques; Inspection; Optical fibers; Silicon; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
