• DocumentCode
    689258
  • Title

    Ultrafast surface inspection using hybrid dispersion laser scanner

  • Author

    Hongwei Chen ; Goda, Keisuke ; Chao Wang ; Jalali, Bahram

  • Author_Institution
    Dept. of Electron. Eng., Tsinghua Univ., Beijing, China
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report an ultrafast surface inspection method using a hybrid dispersion laser scanner. Using the technique, we demonstrate real-time detection of microparticles on silicon wafer surfaces at 1,000 times higher scan rates than conventional methods.
  • Keywords
    high-speed optical techniques; inspection; measurement by laser beam; silicon; Si; hybrid dispersion laser scanner; microparticles; real-time detection; scan rates; silicon wafer surfaces; ultrafast surface inspection method; Dispersion; High-speed optical techniques; Inspection; Optical fibers; Silicon; Surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833641
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=689258