Title :
A superhigh-frequency optoelectromechanical system based on a slotted photonic crystal cavity
Author :
Xiankai Sun ; Xufeng Zhang ; Poot, Menno ; Chi Xiong ; Tang, Hong X.
Author_Institution :
Dept. of Electr. Eng., Yale Univ., New Haven, CT, USA
Abstract :
We develop an all-integrated optoelectromechanical system that operates up to 4.20 GHz. The in-plane bulk acoustic modes of a photonic crystal membrane are electrocapacitively actuated and optically detected by a high-Q slotted photonic crystal cavity.
Keywords :
acousto-optical devices; bulk acoustic wave devices; integrated optics; nanoelectromechanical devices; nanophotonics; photonic crystals; all-integrated optoelectromechanical system; electrocapacitive actuator; frequency 4.2 GHz; high-Q slotted photonic crystal cavity; in-plane bulk acoustic modes; photonic crystal membrane; superhigh-frequency optoelectromechanical system; Acoustics; Cavity resonators; Optical attenuators; Optical coupling; Optical device fabrication; Optical resonators; Optical variables measurement;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
