DocumentCode :
689272
Title :
Aluminum nitride piezo-optomechanical nanobeam cavity
Author :
Linran Fan ; Xiankai Sun ; Chi Xiong ; Schuck, Carsten ; Tang, Hong X.
Author_Institution :
Dept. of Electr. Eng., Yale Univ., New Haven, CT, USA
fYear :
2013
fDate :
9-14 June 2013
Firstpage :
1
Lastpage :
2
Abstract :
We develop a piezoelectrically actuated, one-dimensional photonic and phononic crystal nanocavity fabricated from aluminum nitride. High-quality piezo-optomechanical nanobeam cavities with optical Qo of 1.2 × 105 and mechanical Qm over 10,000 are obtained.
Keywords :
Q-factor; aluminium compounds; nanofabrication; nanophotonics; phononic crystals; photonic crystals; piezo-optical effects; piezoelectric actuators; wide band gap semiconductors; AlN; aluminum nitride; aluminum nitride piezo-optomechanical nanobeam cavity; mechanical Qm; one-dimensional photonic crystal nanocavity; optical Qo; piezoelectric actuator; piezooptomechanical nanobeam cavities; Cavity resonators; Optical amplifiers; Optical device fabrication; Optical fibers; Optical polarization; Optical resonators;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
Type :
conf
Filename :
6833655
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=689272
بازگشت