Title :
Eliminating structural loss in optomechanical resonators using elastic wave interference
Author :
Mian Zhang ; de Oliveira Luiz, Gustavo ; Shah, Shalin ; Nussenzveig, Paulo ; Wiederhecker, Gustavo S. ; Lipson, Michal
Author_Institution :
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
We theoretically and experimentally demonstrate that the support loss of double-disk optomechanical resonators can be minimized using destructive elastic wave interference. We show 100MHz Si3N4 resonators with mechanical quality factor of 104 at room temperature.
Keywords :
elastic waves; light interferometry; mechanical testing; micro-optomechanical devices; optical materials; optical resonators; silicon compounds; Si3N4; Si3N4 resonators; destructive elastic wave interference; double-disk optomechanical resonators; frequency 100 MHz; mechanical quality factor; room temperature; structural loss elimination; support loss; temperature 293 K to 298 K; Interference; Optical device fabrication; Optical imaging; Optical losses; Optical resonators; Optical surface waves; Q-factor;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
