• DocumentCode
    689315
  • Title

    Silicon-platformed nonlinear waveguide in lithium niobate membrane

  • Author

    Utsugida, Takuya ; Kurimura, Sunao ; Muranaka, Yusuke ; Mochizuki, Eiji ; Nakajima, Hiromasa

  • Author_Institution
    Nat. Inst. for Mater. Sci. (NIMS), Tsukuba, Japan
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A novel waveguide structure in Mg:LN membrane was developed on Si platform by wet and dry etching processes. Periodically poled structure in the membrane achieved QPM SHG at telecommunication band.
  • Keywords
    elemental semiconductors; etching; lithium compounds; magnesium; membranes; optical fabrication; optical harmonic generation; optical waveguides; silicon; LiNbO3:Mg-Si; QPM SHG; Si; dry etching; lithium niobate membrane; periodically poled structure; quasiphase matching; second harmonic generation; silicon-platformed nonlinear waveguide; telecommunication band; wet etching; Nonlinear optics; Optical device fabrication; Optical harmonic generation; Optical sensors; Optical waveguides; Optical wavelength conversion; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833698
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=689315