• DocumentCode
    689321
  • Title

    Plasma density measurement using a dispersion interferometer based on second-harmonic generation in orientation-patterned GaAs

  • Author

    Bamford, Douglas J. ; Cummings, Elizabeth A. ; Panasenko, Dmitriy ; Fenner, David B. ; Hensley, Joel M. ; Boivin, R.L. ; Carlstrom, T.N. ; Van Zeeland, M.A.

  • Author_Institution
    Phys. Sci. Inc., Pleasanton, CA, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A dispersion interferometer based on second-harmonic generation in orientation-patterned GaAs has been used to measure the line density of electrons in a radio-frequency plasma with a detection limit of 7 × 1016 m-2.
  • Keywords
    density measurement; electron density; gallium arsenide; high-frequency discharges; light interferometry; optical harmonic generation; plasma density; plasma diagnostics; GaAs; detection limit; dispersion interferometer; electron line density; orientation-patterned GaAs; plasma density measurement; radio-frequency plasma; second-harmonic generation; Crystals; Density measurement; Dispersion; Laser beams; Optical interferometry; Plasma measurements; Plasmas;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833704
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=689321