Title :
Resonant photoacoustic gas sensing with silicon tuning forks
Author :
Kohring, Michael ; Willer, Ulrike ; Schade, Wolfgang
Author_Institution :
Fraunhofer Heinrich Hertz Inst., Goslar, Germany
Abstract :
Silicon micro tuning forks are used as highly frequency selective sound detector for photoacoustic spectroscopy. The resonant properties and temperature dependencies of these sensors are investigated using the example of a fiber coupled methane sensor.
Keywords :
elemental semiconductors; fibre optic sensors; gas sensors; organic compounds; photoacoustic spectroscopy; silicon; vibrations; Si; fiber coupled methane sensor; highly frequency selective sound detector; photoacoustic spectroscopy; resonant photoacoustic gas sensing; resonant properties; silicon microtuning forks; Optical fiber sensors; Optical resonators; Silicon; Temperature measurement; Temperature sensors;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
