DocumentCode
689351
Title
Resonant photoacoustic gas sensing with silicon tuning forks
Author
Kohring, Michael ; Willer, Ulrike ; Schade, Wolfgang
Author_Institution
Fraunhofer Heinrich Hertz Inst., Goslar, Germany
fYear
2013
fDate
9-14 June 2013
Firstpage
1
Lastpage
2
Abstract
Silicon micro tuning forks are used as highly frequency selective sound detector for photoacoustic spectroscopy. The resonant properties and temperature dependencies of these sensors are investigated using the example of a fiber coupled methane sensor.
Keywords
elemental semiconductors; fibre optic sensors; gas sensors; organic compounds; photoacoustic spectroscopy; silicon; vibrations; Si; fiber coupled methane sensor; highly frequency selective sound detector; photoacoustic spectroscopy; resonant photoacoustic gas sensing; resonant properties; silicon microtuning forks; Optical fiber sensors; Optical resonators; Silicon; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6833734
Link To Document