Title :
Real-time depth monitoring of galvo-telecentric laser machining by inline coherent imaging
Author :
Ji, Yuefeng ; Van Vlack, C. ; Webster, P.J.L. ; Fraser, J.M.
Author_Institution :
Dept. of Phys., Queen´s Univ., Kingston, ON, Canada
Abstract :
We achieve in situ, micron-scale tracking of laser machining through a galvo-telecentric beam delivery system using coherent imaging. We collect both high speed intrapulse and interpulse morphology changes as well as overall sweep-to-sweep depth penetration.
Keywords :
galvanometers; high-speed optical techniques; laser beam machining; light coherence; optical images; optical tracking; galvo-telecentric beam delivery system; galvo-telecentric laser machining; high speed interpulse morphology changes; high speed intrapulse morphology changes; micron-scale optical tracking; optical coherent imaging; real-time depth monitoring; sweep-to-sweep depth penetration; Imaging; Laser beams; Machining; Materials; Measurement by laser beam; Monitoring; Real-time systems;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
