DocumentCode
689702
Title
Absorptive thin film characterization with spectroscopic full-field optical coherence tomography
Author
Tuan-Shu Ho ; Chien-Chung Tsai ; Kuang-Yu Hsu ; Sheng-Lung Huang
Author_Institution
Grad. Inst. of Photonics & Optoelectron., Nat. Taiwan Univ., Taipei, Taiwan
fYear
2013
fDate
9-14 June 2013
Firstpage
1
Lastpage
2
Abstract
We have developed a spectroscopic full-field optical coherence tomography system, which can provide an ultrahigh isotropic spatial resolution. The complex refractive index and thickness of an embedded absorptive thin film was simultaneously measured.
Keywords
optical tomography; refractive index; refractive index measurement; thickness measurement; thin films; absorptive thin film thickness measurement; refractive index measurement; spectroscopic full-field optical coherence tomography system; ultrahigh isotropic spatial resolution; Coherence; Optical films; Optical reflection; Optical refraction; Optical variables control; Refractive index; Tomography;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6834089
Link To Document