Title :
Precise measurement of high-speed vibration displacement using triangle-wave phase modulation
Author :
Tanaka, Yuichi ; Miyata, Naoyuki ; Kurokawa, Takashi
Author_Institution :
Div. of Adv. Electr. & Electron. Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan
Abstract :
We propose a measurement system for high-speed vibration displacement using an interferometer with triangle-wave phase modulation. Displacement less than ±45 nm by 1-MHz vibration is proved measurable within a standard deviation of 1.5 nm.
Keywords :
displacement measurement; high-speed optical techniques; light interferometry; measurement by laser beam; optical modulation; vibrations; frequency 1 MHz; high-speed vibration displacement measurement; interferometer; standard deviation; triangle-wave phase modulation; Displacement measurement; Interference; Optical interferometry; Phase modulation; Standards; Vibration measurement; Vibrations;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
