Title :
Mid-infrared chemical sensors on-a-chip using air-clad pedestal silicon waveguides
Author :
Pao Tai Lin ; Singh, V. ; Juejun Hu ; Richardson, Kathleen ; Musgraves, J. David ; Luzinov, Igor ; Hensley, J. ; Kimerling, Lionel C. ; Agarwal, Abhishek
Author_Institution :
Mater. Process. Center, Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
We demonstrate a chip-scale air-clad silicon pedestal waveguide as a Mid-Infrared sensor capable of in-situ monitoring of organic solvents. From changes in the waveguide mode intensities, identification of chemical compositions and concentrations is achieved.
Keywords :
chemical sensors; infrared detectors; integrated optics; lab-on-a-chip; optical sensors; optical waveguides; organic compounds; silicon; Si; chemical composition identification; chemical concentration identification; chip-scale air-clad silicon pedestal waveguide; in-situ monitoring; mid-infrared chemical sensors on-a-chip; organic solvent; waveguide mode intensities; Absorption; Chemical and biological sensors; Chemicals; Optical fiber sensors; Optical fibers; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
