Title :
Design, fabrication, and testing of a Pd-based integrated optical hydrogen sensor
Author :
Carriere, Nicholas ; Bahrami, F. ; Alam, M.Z. ; Mojahedi, M. ; Aitchison, J.S.
Author_Institution :
Edward S. Rogers Sr. Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
Abstract :
A palladium-based integrated optical hydrogen sensor on a silicon-on-insulator platform was designed, fabricated, and tested. The sensitivity and response time of the sensor was recorded for hydrogen concentrations varying from 0-4%.
Keywords :
gas sensors; hydrogen; integrated optics; optical design techniques; optical fabrication; optical sensors; optical testing; palladium; silicon-on-insulator; H2; Pd; hydrogen concentration; palladium-based integrated optical hydrogen sensor; silicon-on-insulator platform; Hydrogen; Lattices; Optical device fabrication; Optical films; Optical sensors; Optical waveguides; Time factors;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
