Title :
Laser diagnostics as a tool to improve combustion based atmospheric SiO2 layer deposition
Author :
Burkert, A. ; Paa, W. ; Neudeck, A. ; Muller, Dirk ; Heft, A. ; Schimanski, A.
Author_Institution :
Inst. of Photonic Technol., Jena, Germany
Abstract :
SiO-LIF fields, and temperatures based on OH-LIF and OH* where used to optimize the burner to substrate distance and the thread temperature during SiOx layer deposition on glass and threads in an atmospheric HMDSO/propane/air flame.
Keywords :
combustion synthesis; flames; fluorescence; pulsed laser deposition; silicon compounds; thin films; SiO-LIF fields; SiO2; atmospheric HMDSO-propane-air flame; combustion based atmospheric layer deposition; laser diagnostics; substrate distance; thread temperature;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA