Title :
Membrane-integrated superconducting nanowire singlephoton detectors
Author :
Najafi, Faraz ; Mower, Jacob ; Hu, Xiaonan ; Bellei, Francesco ; Kharel, P. ; Dane, Andrew ; Ivry, Y. ; Cheong, Loong Fah ; Sunter, Kristen ; Englund, Dirk ; Berggren, Karl K.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
We integrated superconducting nanowire single-photon detectors on sub-400-nm-thick silicon nitride membranes, which can then be transferred and aligned to photonic structures on a secondary chip with sub-micron placement accuracy.
Keywords :
integrated optics; integrated optoelectronics; nanowires; silicon compounds; superconducting photodetectors; SiN; membrane-integrated superconducting nanowire single-photon detectors; photonic structures; secondary chip; silicon nitride membranes; size 400 nm; submicron placement accuracy; Detectors; Integrated circuits; Optical waveguides; Photonics; Silicon; Substrates; Timing jitter;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
