Research on Calibration Uncertainty Evaluation Method of Transfer Standards for Calibrating the On-Wafer Load-Pull System

Author

Han Zhiguo ; Liang Faguo ; Luan Peng ; Li Suoyin ; Li Jingqiang

Author_Institution

Metrol. Center, Hebei Semicond. Res. Inst., Shijiazhuang, China

fYear

2013

fDate

21-23 Sept. 2013

Firstpage

358

Lastpage

361

Abstract

This paper introduces in-situ calibration method of on-wafer load-pull system, researches the calibration uncertainty evaluation method of transfer standards for calibrating the on-wafer load-pull system. Using the GUM uncertainty framework and Mont Carlo Method (MCM) suggested by ISO/IEC to evaluate the calibration uncertainty separately. At last, by analyzing the results of two methods, this paper gives the reasonable transfer standards´ uncertainty for calibrating the on-wafer load-pull system.

Keywords

Monte Carlo methods; calibration; measurement uncertainty; transfer standards; GUM uncertainty framework; ISO-IEC standard; MCM; Monte Carlo method; calibration uncertainty evaluation method; on-wafer load-pull system; transfer standard; Calibration; Equations; Mathematical model; Reflectivity; Scattering parameters; Standards; Uncertainty; GUM; MCM; load-pull; transfer standards; uncertainty evaluation;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation, Measurement, Computer, Communication and Control (IMCCC), 2013 Third International Conference on

Conference_Location

Shenyang

Type

conf

DOI

10.1109/IMCCC.2013.82

Filename

6840471