Title :
Research on Calibration Uncertainty Evaluation Method of Transfer Standards for Calibrating the On-Wafer Load-Pull System
Author :
Han Zhiguo ; Liang Faguo ; Luan Peng ; Li Suoyin ; Li Jingqiang
Author_Institution :
Metrol. Center, Hebei Semicond. Res. Inst., Shijiazhuang, China
Abstract :
This paper introduces in-situ calibration method of on-wafer load-pull system, researches the calibration uncertainty evaluation method of transfer standards for calibrating the on-wafer load-pull system. Using the GUM uncertainty framework and Mont Carlo Method (MCM) suggested by ISO/IEC to evaluate the calibration uncertainty separately. At last, by analyzing the results of two methods, this paper gives the reasonable transfer standards´ uncertainty for calibrating the on-wafer load-pull system.
Keywords :
Monte Carlo methods; calibration; measurement uncertainty; transfer standards; GUM uncertainty framework; ISO-IEC standard; MCM; Monte Carlo method; calibration uncertainty evaluation method; on-wafer load-pull system; transfer standard; Calibration; Equations; Mathematical model; Reflectivity; Scattering parameters; Standards; Uncertainty; GUM; MCM; load-pull; transfer standards; uncertainty evaluation;
Conference_Titel :
Instrumentation, Measurement, Computer, Communication and Control (IMCCC), 2013 Third International Conference on
Conference_Location :
Shenyang
DOI :
10.1109/IMCCC.2013.82
