Title :
Research on the Verification Method of the Agilent B1505A Semiconductor Device Analyzer
Author :
Qiao Yu-e ; Liang Fa-guo ; Zheng Shi-qi ; Wu Ai-hua ; Wang Yi-bang ; Zhai Yu-wei ; Liu Yan
Author_Institution :
Metrol. Center, Hebei Semicond. Res. Inst., Shijiazhuang, China
Abstract :
Verification schemes for parameters of semiconductor analyzers, including high voltage and low current, are proposed. As a typical model of the new-generation high-performance semi-conductor analyzer, setup structure and working principals of B1505A is studied. Software for auto verification is coded based on B1505A. Uncertainty analysis confirms the authenticity of results from B1505A. Our work provides an approach for verifying high-performance semiconductor analyzers.
Keywords :
semiconductor device breakdown; semiconductor devices; Agilent B1505A; auto verification; semiconductor device analyzer; Accuracy; Current measurement; Semiconductor device measurement; Semiconductor devices; Standards; Uncertainty; Voltage measurement; B1505A; auto verification; semiconductor device analyzer; uncertainty;
Conference_Titel :
Instrumentation, Measurement, Computer, Communication and Control (IMCCC), 2013 Third International Conference on
Conference_Location :
Shenyang
DOI :
10.1109/IMCCC.2013.86
