Title :
Calibration of the MgF2 Biplate Compensator Using a Straight-Through Ellipsometer
Author :
Gaozeng Cui ; Tao Liu ; Guoguang Li ; Yaqin Chen ; Xia Guo
Author_Institution :
Key Lab. of Microelectron. Devices & Integrated Technol., Beijing Univ. of Technol., Beijing, China
Abstract :
Zero order MgF2 compensators are extensively used in deep ultra-violet(DUV) broadband optical instruments. This biplate compensator is made by two MgF2 wave plates. For DUV broadband spectroscopic ellipsometers, the misalignment between the principal axes of the two MgF2 wave plates must be carefully calibrated for the phase-retardance in order for this kind of compensator to be used in a high accuracy measurement. In this paper, we present a novel calibration method for such biplate compensator using a straight-through PCRA (polarizer-rotating compensator-analyzer) ellipsometer. The theoretical formulae of the biplate compensator and the calibration method are derived by means of Jones matrix calculus. The experimental result for characterizing a commercial zero-order MgF2 biplate compensator is presented. This method can be applied to multi-wave plate compensators, for example, achromatic and super achromatic compensators.
Keywords :
ellipsometers; magnesium compounds; optical polarisers; DUV broadband spectroscopic ellipsometers; Jones matrix calculus; MgF2; achromatic compensators; calibration method; deep ultraviolet broadband optical instruments; multiwaveplate compensators; phase-retardance; polarizer-rotating compensator-analyzer; principal axes; straight-through PCRA ellipsometer; zero-order biplate compensator; Broadband communication; Calibration; Ellipsometry; Instruments; Microelectronics; Optical polarization; biplate compensator; misalignment angle; optical axis; spectroscopic ellipsometry; waveplates;
Conference_Titel :
Instrumentation, Measurement, Computer, Communication and Control (IMCCC), 2013 Third International Conference on
Conference_Location :
Shenyang
DOI :
10.1109/IMCCC.2013.162
