Title :
3-D FEM simulation of piezoelectric boundary acoustic wave resonator
Author :
Yan Zhang ; Jing Chen ; Wei-biao Wang ; Tao Han
Author_Institution :
Dept. of Instrum. Sci. & Eng., Shanghai Jiao Tong Univ., Shanghai, China
Abstract :
In this paper, a 3D finite element method (FEM) is performed to accurately investigate the propagation characteristics of PBAW in SiO2/metal grating/rotated YX-LiNbO3 substrate structure by the commercial software of COMSOL Multiphysics. The simulated results show a SH-type PBAW with large K2 in SiO2/Cu grating/0° or 15° YX-LiNbO3 substrate structure. The optimized structure has been obtained which could suppress spurious signals providing not seriously reducing K2 of the main mode. It´s proved that the analysis is very helpful for understanding and design of such layered SAW devices.
Keywords :
copper; finite element analysis; lithium compounds; niobium compounds; silicon compounds; surface acoustic wave resonators; 3D FEM simulation; COMSOL multiphysics; LiNbO3; SH-type PBAW; SiO2-Cu; commercial software; finite element method; layered SAW devices; metal grating-rotated substrate structure; piezoelectric boundary acoustic wave resonator; spurious signal suppression; Acoustic waves; Finite element analysis; Gratings; Lithium niobate; Substrates; Three-dimensional displays; 3-D FEM analysis; Rayleigh-type PBAW; SH-type PBAW; SiO2/Cu/YX-LiNbO3; large K2;
Conference_Titel :
Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), 2013 Symposium on
Conference_Location :
Changsha
Print_ISBN :
978-1-4799-3289-4
DOI :
10.1109/SPAWDA.2013.6841130
