DocumentCode
69164
Title
Ultralow Contact Resistivity of Cu/Au With
-Type ZnS Nanoribbons for Nanoelectronic Applications
Author
Yongqiang Yu ; Longhui Zeng ; Yang Jiang ; Jiansheng Jie
Author_Institution
Sch. of Mater. Sci. & Eng., Hefei Univ. of Technol., Hefei, China
Volume
34
Issue
6
fYear
2013
fDate
Jun-13
Firstpage
810
Lastpage
812
Abstract
Here, we report a new metallization scheme for achieving excellent ohmic contact to p-type II-VI nanostructures at room temperature. Bilayer electrodes consisting of Cu (4 nm)/Au (50 nm) provided a specific contact resistivity as low as 5.6 × 10-7 Ω cm2 with p-ZnS nanoribbons (NRs). Interface analysis via depth profiling X-ray photoemission spectroscopy, Auger electron spectroscopy, and high-resolution transmission electron microscopy revealed the formation of a highly conductive Cu2S interfacial layer, which could serve as the buffer layer and thus promote the hole transport from NR to electrode. High-performance Ti/p-ZnS NR Schottky barrier diodes were then fabricated based on the Cu/Au ohmic contact.
Keywords
Auger electron spectroscopy; II-VI semiconductors; Schottky barriers; Schottky diodes; X-ray photoelectron spectra; buffer layers; copper; electrical resistivity; electrodes; gold; metallisation; nanoelectronics; nanoribbons; ohmic contacts; semiconductor-metal boundaries; titanium; transmission electron microscopy; wide band gap semiconductors; zinc compounds; Auger electron spectroscopy; Cu-Au-Ti-ZnS; X-ray photoemission spectroscopy; bilayer electrodes; buffer layer; depth profiling; high-performance NR Schottky barrier diodes; high-resolution transmission electron microscopy; highly conductive Cu2S interfacial layer formation; interface analysis; metallization; nanoelectronic applications; ohmic contact; p-type II-VI nanostructures; p-type zinc sulphide nanoribbons; size 4 nm; size 50 nm; ultralow contact resistivity; $p$ -type; Cu/Au electrode; Schottky barrier diodes; ZnS nanoribbons (NRs); ohmic contact;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2013.2258319
Filename
6517581
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