Title :
MEMS and MEMS based strain gauge load cells — A review
Author :
Subramanya, S.B. ; Prasad, M. G. Anantha
Author_Institution :
S.D.M. Coll. of Eng. & Technol., Dharwad, India
Abstract :
This paper deals with the review of MEMS technology and MEMS based load cells/force sensors. A brief introduction to the MEMS technology, strain gauge and load cells/force sensors is given. Design of load cells / force sensors using various materials and their impacts in the design are reviewed and discussed.
Keywords :
force sensors; micromechanical devices; strain gauges; MEMS based strain gauge load cells; MEMS technology; force sensors; strain gauge; actuate; gauge factor; microsystem; strain gauge; transduction;
Conference_Titel :
Research & Technology in the Coming Decades (CRT 2013), National Conference on Challenges in
Conference_Location :
Ujire
Electronic_ISBN :
978-1-84919-868-4
DOI :
10.1049/cp.2013.2516
