DocumentCode
696575
Title
The tunnel current as a subnanometer motion sensor
Author
Blanvillain, S. ; Voda, A. ; Besancon, G. ; Buche, G.
Author_Institution
Dept. of Control Syst., Grenoble Univ., Grenoble, France
fYear
2009
fDate
23-26 Aug. 2009
Firstpage
5003
Lastpage
5008
Abstract
This paper proposes a new approach in order to use the tunnel current as a position sensor at nanoscale. It is shown that electron tunneling commonly used in Scanning Tunneling Microscopes (STM) can be used to control the motion of a Nano Electromechanical System (NEMS) with an accuracy of 1.10-12m/√Hz, at ambient temperature, and using only one electrostatic actuator. The designed control strategy is based on two feedback loops, robust control design, linearizing feedback, and a Kalman filter in order to minimize noises present at nanoscale.
Keywords
Kalman filters; electrostatic actuators; motion measurement; nanosensors; position measurement; robust control; scanning tunnelling microscopy; tunnelling; Kalman filter; NEMS; electron tunneling; electrostatic actuator; feedback loops; linearizing feedback; nanoelectromechanical system; position sensor; robust control design; scanning tunneling microscopes; subnanometer motion sensor; tunnel current; Actuators; Bandwidth; Electrodes; Force; Noise; Robustness; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Control Conference (ECC), 2009 European
Conference_Location
Budapest
Print_ISBN
978-3-9524173-9-3
Type
conf
Filename
7075193
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