Title :
Control of the temperature on rapid thermal processing by AI based techniques
Author :
Fortuna, L. ; Muscato, G. ; Nunnari, G. ; Papaleo, R.
Author_Institution :
Dipt. Elettrico, Elettronico e Sistemistico, Univ. degli Studi di Catania, Catania, Italy
Abstract :
In this paper the problem of controlling the temperature on an RTP system is addressed. The key points of the contribution are the following: a neural model of the considered system is obtained. Based on this model an optimal controller is derived. The goodness of the control system behaviour are shown also in comparison with those reported in literature.
Keywords :
artificial intelligence; control engineering computing; neurocontrollers; optimal control; production engineering computing; rapid thermal processing; semiconductor device manufacture; temperature control; AI based techniques; RTP system; control system behaviour; neural model; optimal controller; rapid thermal processing; semiconductor processing industry; temperature control; Artificial neural networks; Mathematical model; Semiconductor device modeling; Semiconductor process modeling; Temperature control; Temperature measurement; Intelligent control; Modeling; Neural Nets;
Conference_Titel :
Control Conference (ECC), 1997 European
Conference_Location :
Brussels
Print_ISBN :
978-3-9524269-0-6
