DocumentCode
700902
Title
Control of the temperature on rapid thermal processing by AI based techniques
Author
Fortuna, L. ; Muscato, G. ; Nunnari, G. ; Papaleo, R.
Author_Institution
Dipt. Elettrico, Elettronico e Sistemistico, Univ. degli Studi di Catania, Catania, Italy
fYear
1997
fDate
1-7 July 1997
Firstpage
2798
Lastpage
2803
Abstract
In this paper the problem of controlling the temperature on an RTP system is addressed. The key points of the contribution are the following: a neural model of the considered system is obtained. Based on this model an optimal controller is derived. The goodness of the control system behaviour are shown also in comparison with those reported in literature.
Keywords
artificial intelligence; control engineering computing; neurocontrollers; optimal control; production engineering computing; rapid thermal processing; semiconductor device manufacture; temperature control; AI based techniques; RTP system; control system behaviour; neural model; optimal controller; rapid thermal processing; semiconductor processing industry; temperature control; Artificial neural networks; Mathematical model; Semiconductor device modeling; Semiconductor process modeling; Temperature control; Temperature measurement; Intelligent control; Modeling; Neural Nets;
fLanguage
English
Publisher
ieee
Conference_Titel
Control Conference (ECC), 1997 European
Conference_Location
Brussels
Print_ISBN
978-3-9524269-0-6
Type
conf
Filename
7082533
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