Title :
Application of self-sensing technique for position control considering vibration suppression in piezo-driven stage
Author :
Seki, Kenta ; Iwasaki, Makoto
Author_Institution :
Dept. of Comput. Sci. & Eng., Nagoya Inst. of Technol., Nagoya, Japan
Abstract :
This paper presents a position control approach considering vibration suppression using self-sensing techniques in piezoelectric actuators. In order to achieve the high precision positioning using piezoelectric actuators, mechanical vibrations as well as nonlinear properties should be compensated. In this paper, a robust vibration suppression control system against resonant frequency variations is designed, where a minor loop aided by a self-sensing technique is added on the position control system. In the minor loop design, the reduction of sensitivity characteristic at around the vibration frequencies is considered to suppress the residual vibration for the reference and disturbance. Major loop for augmented plant including self-sensing minor loop, on the other hand, is designed by considering system stability and servo characteristic. The proposed approach has been evaluated by experiments using a piezo-driven stage.
Keywords :
piezoelectric actuators; position control; servomotors; vibration control; high-precision positioning; mechanical vibrations; nonlinear properties; piezo-driven stage; piezoelectric actuators; position control system; residual vibration suppression; resonant frequency variations; robust vibration suppression control system; self-sensing minor loop; self-sensing technique; sensitivity characteristic reduction; servo characteristic; system stability; vibration frequencies; Adaptive control; Bridge circuits; Gain; Resonant frequency; Sensitivity; Servomotors; Vibrations;
Conference_Titel :
Mechatronics (ICM), 2015 IEEE International Conference on
Conference_Location :
Nagoya
DOI :
10.1109/ICMECH.2015.7083988