DocumentCode :
702847
Title :
Compact device for CO2 optical sensing using macroporous silicon photonic crystals
Author :
Vega, Didac ; Rodriguez, Angel ; Trifonov, Trifon ; Calavia, Raul ; Vilanova, Xavier
Author_Institution :
Dept. d´Eng. Electron., Univ. Politec. de Catalunya (UPC), Barcelona, Spain
fYear :
2015
fDate :
11-13 Feb. 2015
Firstpage :
1
Lastpage :
3
Abstract :
A photonic crystal based on a macroporous silicon structure has been fabricated and successfully used for the detection of carbon dioxide. In this paper, the device and the measurement results are presented. The sensing device here described uses an optical approach to the detection of the gas. The use of a photonic crystal allows creating a compact device working in the medium infrared spectral range. A 700 nm square lattice macroporous structure was fabricated by electrochemical etching, creating a photonic gap centered at the 4.2 μm, a CO2 absorption line. The obtained results rely only on the absorption spectra measurement.
Keywords :
carbon compounds; elemental semiconductors; etching; gas sensors; optical fabrication; optical lattices; optical sensors; photonic crystals; porous semiconductors; silicon; CO2; Si; absorption spectra measurement; carbon dioxide detection; electrochemical etching; gas detection; macroporous silicon photonic crystals; medium infrared spectral range; optical sensing; photonic gap; square lattice macroporous structure; wavelength 4.2 mum; Absorption; Optical device fabrication; Photonic crystals; Reflectivity; Sensors; Silicon; chemical sensors; electrochemical etching; gas sensors; macroporous silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices (CDE), 2015 10th Spanish Conference on
Conference_Location :
Madrid
Type :
conf
DOI :
10.1109/CDE.2015.7087494
Filename :
7087494
Link To Document :
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