DocumentCode :
70416
Title :
Leading the field since 1884
Volume :
26
Issue :
4
fYear :
2013
fDate :
Nov. 2013
Firstpage :
627
Lastpage :
627
Abstract :
Advertisement: IEEE members have published visionary new technologies since 1884. Libraries and IEEE, leaders in technical knowledge.
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2013.2286914
Filename :
6648731
Link To Document :
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