• DocumentCode
    70416
  • Title

    Leading the field since 1884

  • Volume
    26
  • Issue
    4
  • fYear
    2013
  • fDate
    Nov. 2013
  • Firstpage
    627
  • Lastpage
    627
  • Abstract
    Advertisement: IEEE members have published visionary new technologies since 1884. Libraries and IEEE, leaders in technical knowledge.
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2013.2286914
  • Filename
    6648731
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=70416