Title :
H∞ control of piezo actuated tilting mirror mechanism
Author_Institution :
Fac. Mech. Eng., Univ. of Twente, Enschede, Netherlands
fDate :
Aug. 31 1999-Sept. 3 1999
Abstract :
In here the high bandwidth (2000 Hz.) feedback control of a precision mechanisms driven by a piezo actuator demanding a high absolute accuracy is discussed. The mechanism considered is rotating a mirror for laser bundle manipulation. It will be shown that a loopshaping controller design using the mixed sensitivity approach provides robust performance in the non co-located control case.
Keywords :
H∞ control; attitude control; control system synthesis; feedback; laser beam welding; laser mirrors; piezoelectric actuators; printed circuit manufacture; sensitivity analysis; surface mount technology; H∞ control; high bandwidth feedback control; laser bundle manipulation; laser welding; loopshaping controller design; mixed sensitivity approach; piezo actuated tilting mirror mechanism; piezo actuator; precision mechanisms; printed circuit boards; surface mounted devices; Actuators; Bandwidth; Finite element analysis; Mirrors; Sensitivity; Transfer functions; Vibrations;
Conference_Titel :
Control Conference (ECC), 1999 European
Conference_Location :
Karlsruhe
Print_ISBN :
978-3-9524173-5-5
