Title :
Bias self-calibration techniques using silicon disc resonator gyroscope
Author :
Ge, Howard H. ; Liu, John Y. ; Buchanan, Bryan
Abstract :
This paper presents several addvanced error compensation and bias self-calibration techniqques based on an extended gyro error model. The techhniques were implemented on a MEMS Disc Resonator Gyro (DRG). Preliminary test data shows the evidence off a promising navigational grade MEMS gyro.
Keywords :
calibration; elemental semiconductors; error compensation; gyroscopes; micromechanical resonators; silicon; MEMS disc resonator gyro; Si; advanced error compensation; bias self-calibration technique; extended gyro error model; microelectromechanical system; navigational grade MEMS gyro; silicon disc resonator gyroscope; Electrodes; Force; Gyroscopes; Micromechanical devices; Temperature measurement; Tuning; Voltage control;
Conference_Titel :
Inertial Sensors and Systems (ISISS), 2015 IEEE International Symposium on
Conference_Location :
Hapuna Beach, HI
DOI :
10.1109/ISISS.2015.7102375