Title :
Observations on substrate characterisation through Coplanar Transmission Line Impedance measurements
Author :
Floyd, Liam ; Pike, John ; Jing Tao ; Jackson, Nathan
Author_Institution :
Tyndall Nat. Inst., Cork, Ireland
Abstract :
In the course of developing a GaAs Schottky diode membrane technology for millimeter wave applications (viz. THz mixers and multipliers) it was found that subtle changes and variations introduced into the membrane structure can significantly affect the circuit performance. We describe how these effects manifest themselves and, using S-parameter measurements on a variety of substrates, show how they can be explained in terms of conductive or charge layers that are observable through Coplanar Transmission Line Impedance measurements. A modified transmission line model is given.
Keywords :
III-V semiconductors; S-parameters; Schottky diodes; coplanar transmission lines; electric impedance measurement; gallium arsenide; millimetre wave diodes; semiconductor device measurement; substrates; GaAs; S-parameter measurements; Schottky diode membrane technology; THz mixers; THz multipliers; conductive charge layers; coplanar transmission line impedance measurements; millimeter wave applications; substrate characterisation; Capacitance; Capacitance measurement; Gallium arsenide; Schottky diodes; Standards; Substrates; Transmission line measurements;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2015 International Conference on
Conference_Location :
Tempe, AZ
Print_ISBN :
978-1-4799-8302-5
DOI :
10.1109/ICMTS.2015.7106099