DocumentCode
708638
Title
Observations on substrate characterisation through Coplanar Transmission Line Impedance measurements
Author
Floyd, Liam ; Pike, John ; Jing Tao ; Jackson, Nathan
Author_Institution
Tyndall Nat. Inst., Cork, Ireland
fYear
2015
fDate
23-26 March 2015
Firstpage
224
Lastpage
229
Abstract
In the course of developing a GaAs Schottky diode membrane technology for millimeter wave applications (viz. THz mixers and multipliers) it was found that subtle changes and variations introduced into the membrane structure can significantly affect the circuit performance. We describe how these effects manifest themselves and, using S-parameter measurements on a variety of substrates, show how they can be explained in terms of conductive or charge layers that are observable through Coplanar Transmission Line Impedance measurements. A modified transmission line model is given.
Keywords
III-V semiconductors; S-parameters; Schottky diodes; coplanar transmission lines; electric impedance measurement; gallium arsenide; millimetre wave diodes; semiconductor device measurement; substrates; GaAs; S-parameter measurements; Schottky diode membrane technology; THz mixers; THz multipliers; conductive charge layers; coplanar transmission line impedance measurements; millimeter wave applications; substrate characterisation; Capacitance; Capacitance measurement; Gallium arsenide; Schottky diodes; Standards; Substrates; Transmission line measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures (ICMTS), 2015 International Conference on
Conference_Location
Tempe, AZ
ISSN
1071-9032
Print_ISBN
978-1-4799-8302-5
Type
conf
DOI
10.1109/ICMTS.2015.7106099
Filename
7106099
Link To Document