• DocumentCode
    708638
  • Title

    Observations on substrate characterisation through Coplanar Transmission Line Impedance measurements

  • Author

    Floyd, Liam ; Pike, John ; Jing Tao ; Jackson, Nathan

  • Author_Institution
    Tyndall Nat. Inst., Cork, Ireland
  • fYear
    2015
  • fDate
    23-26 March 2015
  • Firstpage
    224
  • Lastpage
    229
  • Abstract
    In the course of developing a GaAs Schottky diode membrane technology for millimeter wave applications (viz. THz mixers and multipliers) it was found that subtle changes and variations introduced into the membrane structure can significantly affect the circuit performance. We describe how these effects manifest themselves and, using S-parameter measurements on a variety of substrates, show how they can be explained in terms of conductive or charge layers that are observable through Coplanar Transmission Line Impedance measurements. A modified transmission line model is given.
  • Keywords
    III-V semiconductors; S-parameters; Schottky diodes; coplanar transmission lines; electric impedance measurement; gallium arsenide; millimetre wave diodes; semiconductor device measurement; substrates; GaAs; S-parameter measurements; Schottky diode membrane technology; THz mixers; THz multipliers; conductive charge layers; coplanar transmission line impedance measurements; millimeter wave applications; substrate characterisation; Capacitance; Capacitance measurement; Gallium arsenide; Schottky diodes; Standards; Substrates; Transmission line measurements;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures (ICMTS), 2015 International Conference on
  • Conference_Location
    Tempe, AZ
  • ISSN
    1071-9032
  • Print_ISBN
    978-1-4799-8302-5
  • Type

    conf

  • DOI
    10.1109/ICMTS.2015.7106099
  • Filename
    7106099